材料物理科技英语PDF电子书下载

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Unit 1 Basis of Materials Science 1

1.1 Introduction 1

1.2 Materials Science and Engineering 3

1.3 Classification of Materials 8

1.4 Advanced Materials 14

1.5 Microstructure characterization of Materials 19

Unit 2 Plasmas 42

2.1 DC Glow Discharge 44

2.2 RF Discharges 47

2.3 High-Density Plasmas 50

Unit 3 Vacuum Technology 59

3.1 Pressure Ranges and Vacuum Pumps 60

3.2 Vacuum Seals and Pressure Measurement 69

Unit 4 Thin Film Deposition 76

4.1 Physical Deposition 77

4.2 Chemical Deposition 83

4.3 Epitaxial Growth 94

Unit 5 Devices Fabrication Process 102

5.1 Introduction 102

5.2 Ion implantation 103

5.3 Photolithography 105

5.4 Etch 109

5.5 Metallization 110

5.6 Process Integration 111

Unit 6 Reading Practice 128

6.1 Paper 128

6.2 Patent 140

6.3 Manual Guide 147

Unit 7 Writing Practice 160

7.1 Structure of Paper 160

7.2 Example 1 165

7.3 Example 2 171

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