THE SCIENCE AND ENGINEERING OF MICROELECTRONIC FABRICATION SECOND EDOITON
（美）STEPHEN A.CAMPBELL著2003 年出版603 页ISBN：7505386263
本书系统地介绍了微电子制造科学原理与工程技术，覆盖了集成电路制造所涉及的所有基本单项工艺，包括光刻、等离子体和反应离子刻蚀、离子注入、扩散、氧化、蒸发、气相外延生长、溅射和化学气相淀积等。对每一...
NUCLEUS ENGLISH FOR SCIENCE AND TECHNOLOGY GENERAL SCIENCE
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